Highly sensitive MEMS microphone with optical readout
Category
Academic lecture
Language
English
Author(s)
- Ib-Rune Johansen
- Thor Bakke
- Dag Thorstein Wang
- Aina Kristin Herbjørnrød
- Geir Uri Jensen
- Anand Summanwar
- Ole-Herman Bjor
- Peter Kaspersen
- Dung Do Dang
- Peter Geiser
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- Unknown
Presented at
Norwegian electro - optics meeting 2014
Place
Fevik
Date
23.04.2014 - 25.04.2014
Organizer
Sintef, FFI and UniK on behalf of the Norwegian physical soc