Edgeless sensors fabricated without support wafer

Edgeless sensors fabricated without support wafer

Category

Academic article

Language

English

Author(s)

Ozhan Koybasi
Jiaguo Zhang
Angela Chun Ying Kok
Anand Summanwar
Marco Povoli
Lars Breivik
Anna Bergamaschi
Bernd Schmitt

Affiliation

SINTEF Digital / Microsystems and Nanotechnology
Paul Scherrer Institute

Year

2019

Published in

Nuclear Instruments and Methods in Physics Research Section A : Accelerators, Spectrometers, Detectors and Associated Equipment

ISSN

0168-9002

External resources

https://pdf.sciencedirectassets.com/271580/1-s2.0-S0168900219X00364/1-s2.0-S0168900219314792/main.pdf?X-Amz-Date=20200217T112017Z&X-Amz-Algorithm=AWS4-HMAC-SHA256&X-Amz-Signature=d55b4c2bf54b266c0b0df

DOI

https://doi.org/10.1016/j.nima.2019.163176