Edgeless sensors fabricated without support wafer
Edgeless sensors fabricated without support wafer
Category
Academic article
Language
English
Affiliation
- SINTEF Digital / Microsystems and Nanotechnology
- Paul Scherrer Institute
Year
2019
Published in
Nuclear Instruments and Methods in Physics Research Section A : Accelerators, Spectrometers, Detectors and Associated Equipment
ISSN
0168-9002