To main content

Edgeless sensors fabricated without support wafer

Edgeless sensors fabricated without support wafer

Category
Academic article
Language
English
Author(s)
Affiliation
  • SINTEF Digital / Microsystems and Nanotechnology
  • Paul Scherrer Institute
Year
2019
Published in
Nuclear Instruments and Methods in Physics Research Section A : Accelerators, Spectrometers, Detectors and Associated Equipment
ISSN
0168-9002