Publications
- Investigation of surface passivation thin film materials for improved predictable quantum efficiency detectors
- Edgeless silicon sensors fabricated without support wafer
- Fabrication of active-edge detectors without support wafer using a unique "perforated edge" approach
- Characterization of active-edge detectors fabricated without support wafer
- A novel and simple method for fabrication of edgeless silicon radiation detectors
- Development of N-on-P planar technology at SINTEF MiNaLab
- Status of 3D detector development at SINTEF for ITk Upgrade
- Fabrication process for CMUT arrays with polysilicon electrodes, nanometre precision cavity gaps and through-silicon vias
- CMUT ARRAYS WITH POLYSILICON BOTTOM ELECTRODES AND NANO-METER PRECISION CAVITY GAPS
- Micromachined optical microphone based on a modulated diffractive lens