Technologies enabling 3D stacking of MEMS
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Category
Academic chapter/article/Conference paper
Language
English
Author(s)
- Maaike Margrete Visser Taklo
- Michal Marek Mielnik
- Kari Schjølberg-Henriksen
- Preben Storås
- Hannah Rosquist Tofteberg
- Nicolas Lietaer
- Rolf Johannessen
Affiliation
- Norwegian University of Science and Technology
- SINTEF Digital / Smart Sensors and Microsystems
Year
2010Publisher
Goldenbogen Verlag
Book
Smart Systems Integration and ReliabilityHonory volume on occasion ofHerbert Reichl's 65th birthday
ISBN
978-3-932434-77-8
Page(s)
136 - 145