3D Integration of MEMS and IC: Design, Technology and Simulations
Category
Academic chapter/article/Conference paper
Language
English
Author(s)
- Maaike Margrete Visser Taklo
- Kari Schjølberg-Henriksen
- Nicolas Lietaer
- Josef Prainsack
- Anders Elfving
- Josef Weber
- Matthias Klein
- Peter Schneider
- Sven Reitz
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- Germany
- SensoNor ASA
Year
2010Publisher
Springer
Book
Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators (NATO Science for Peace and Security Series B: Physics and Biophysics)
ISBN
904813806X
Page(s)
191 - 203