Elemental distribution and oxygen deficiency of magnetron sputtered indium tin oxide films

Category

Academic article

Language

English

Author(s)

Annett Thøgersen
Margrethe Holmer Rein
Edouard Monakhov
Jeyanthinath Mayandi
Spyridon Diplas

Affiliation

Institute for Energy Technology
University of Oslo
SINTEF Industry / Sustainable Energy Technology

Year

2011

Published in

Journal of Applied Physics

ISSN

0021-8979

Publisher

AIP Publishing (American Institute of Physics)

Volume

109

Issue

11

DOI

https://doi.org/10.1063/1.3587174

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