Abstract
Thin-film piezoelectric PZT, integrated in silicon-based MEMS, may be regarded as a "down-to-earth" marriage of nano- and micro-technology. The key piezoelectric properties
of the PZT films require nano-scale control of chemistry and
micro- structure, while the siliconbased device itself is state-of-theart MEMS-type technology. Modelling
and design of the demonstrator devices has targeted resonating structures operating in the
1-10 kHz range for "easy listening",giving simple, but effective, operating demonstration.
of the PZT films require nano-scale control of chemistry and
micro- structure, while the siliconbased device itself is state-of-theart MEMS-type technology. Modelling
and design of the demonstrator devices has targeted resonating structures operating in the
1-10 kHz range for "easy listening",giving simple, but effective, operating demonstration.