Metallization scheme and release methods for fabrication of RF MEMS switches
Category
Academic lecture
Language
English
Author(s)
- Shimul Chandra Saha
- Geir uri Jensen
- Trond Sæther
- Håkon Sagberg
- Erik Poppe
Affiliation
- Norwegian University of Science and Technology
- SINTEF
- Unknown
Presented at
33rd Micro- and Nano- Engineering conference (MNE 2007),
Date
15.09.2007