Reliable Pb(Zr,Ti)O3-based thin film piezoelectric micromirrors for space-applications
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Category
Academic article
Language
English
Author(s)
- Runar Dahl-Hansen
- Jo Gjessing
- Peter Mardilovich
- Charalampos Fragkiadakis
- Jostein Thorstensen
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- aixACCT Systems GmbH
Date
26.09.2022
Year
2022Published in
Applied Physics Letters
ISSN
0003-6951
Publisher
AIP Publishing (American Institute of Physics)
Volume
121
Issue
13
Page(s)
1 - 8