Improving ALD-Al2O3 Surface Passivation of Si Utilizing Pre-Existing SiOx

Client

• Research Council of Norway (RCN) / 295864
• Research Council of Norway (RCN) / 289437

Author(s)

• Michael Getz
• Marco Povoli
• Eduard Monakhov

Affiliation

• University of Oslo
• SINTEF Digital / Smart Sensors and Microsystems

Issue

4

DOI

Read fulltext