MEMS-tunable dielectric metasurface lens using thin-film PZT for large displacements at low voltages

Author(s)

• Christopher Andrew Dirdal
• Paul Conrad Vaagen Thrane
• Firehun Tsige Dullo
• Jo Gjessing
• Anand Summanwar
• Jon Tschudi

Affiliation

• SINTEF Digital / Microsystems and Nanotechnology

Issue

5

DOI