MEMS-tunable dielectric metasurface lens using thin-film PZT for large displacements at low voltages
Category
Academic article
Language
English
Author(s)
- Christopher Andrew Dirdal
- Paul Conrad Vaagen Thrane
- Firehun Tsige Dullo
- Jo Gjessing
- Anand Summanwar
- Jon Tschudi
Affiliation
- SINTEF Digital / Microsystems and Nanotechnology
Year
2022Published in
Optics Letters
ISSN
0146-9592
Volume
47
Issue
5
Page(s)
1049 - 1052