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MEMS-tunable dielectric metasurface lens using thin-film PZT for large displacements at low voltages

Category

Academic article

Language

English

Affiliation

  • SINTEF Digital / Microsystems and Nanotechnology

Year

2022

Published in

Optics Letters

ISSN

0146-9592

Volume

47

Issue

5

Page(s)

1049 - 1052

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