MEMS-tunable dielectric metasurface lens using thin-film PZT for large displacements at low voltages

Client

• Research Council of Norway (RCN) / 323322

Author(s)

• Christopher Andrew Dirdal
• Paul Conrad Vaagen Thrane
• Firehun Tsige Dullo
• Jo Gjessing
• Anand Summanwar
• Jon Tschudi

Affiliation

• SINTEF Digital / Smart Sensors and Microsystems

Issue

5

DOI

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