High-Rate Deposition of Epitaxial Silicon by E-beam Evaporation
Category
Academic lecture
Client
- Research Council of Norway (RCN) / 257639
Language
English
Author(s)
- Marit Synnøve Sæverud Stange
- Runar Dahl-Hansen
- Tor Olav Sunde
- Alexander G. Ulyashin
Affiliation
- SINTEF Industry / Sustainable Energy Technology
- Unknown
Presented at
Society of Vacuum Coaters 2021
Place
online
Date
01.05.2021 - 06.05.2021
Organizer
SVC