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High-Rate Deposition of Epitaxial Silicon by E-beam Evaporation

Category

Conference lecture

Language

English

Affiliation

  • SINTEF Industry / Sustainable Energy Technology

Presented at

Society of Vacuum Coaters 2021

Place

online

Date

01.05.2021 - 06.05.2021

Organizer

SVC

Year

2021

View this publication at Norwegian Research Information Repository