Development of a high throughput metalens fabrication process relying on Bosch Deep Reac- tive Ion Etching and UV Nano Imprint Lithorgraphy
Category
Academic lecture
Language
English
Author(s)
- Christopher Andrew Dirdal
- Geir Uri Jensen
- Hallvard Angelskår
- Jo Gjessing
- Paul Conrad Vaagen Thrane
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
Presented at
META2021
Place
On-Line
Date
20.07.2021 - 23.07.2021
Organizer
Metaconferences.org