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Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching

Category

Academic article

Client

  • EEA - The Agreement on the European Economic Area / 323322

Language

English

Author(s)

Affiliation

  • Romania
  • SINTEF Digital / Microsystems and Nanotechnology

Year

2021

Published in

Micromachines

ISSN

2072-666X

Publisher

MDPI

Volume

12

Issue

5

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