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Dynamical Behaviour of a piezoMEMS Micromirror During Degradation

Category

Academic lecture

Language

English

Author(s)

Affiliation

  • Unknown
  • SINTEF Digital / Microsystems and Nanotechnology
  • Norwegian University of Science and Technology

Presented at

2019 IEEE International Symposium on Applications of Ferroelectrics (ISAF)

Place

EPFL Lausanne

Date

14.07.2019 - 19.07.2019

Year

2019

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