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Dynamical Behaviour of a piezoMEMS Micromirror During Degradation

Dynamical Behaviour of a piezoMEMS Micromirror During Degradation

Category
Academic lecture
Language
English
Affiliation
  • Unknown
  • SINTEF Digital / Microsystems and Nanotechnology
  • Norwegian University of Science and Technology
Presented at
2019 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
Place
EPFL Lausanne
Date
14.07.2019 - 19.07.2019
Year