Dynamical Behaviour of a piezoMEMS Micromirror During Degradation
Category
Academic lecture
Language
English
Author(s)
- Runar Dahl-Hansen
- Christopher Andrew Dirdal
- Jo Gjessing
- Per Thomas Martin Tybell
- Frode Tyholdt
Affiliation
- Unknown
- SINTEF Digital / Smart Sensors and Microsystems
- Norwegian University of Science and Technology
Presented at
2019 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
Place
EPFL Lausanne
Date
14.07.2019 - 19.07.2019