Stress considerations for sputtered lead-free (Ba,Ca)(Zr,Ti)O3 thin films
Category
Academic lecture
Client
- Research Council of Norway (RCN) / 250184
Language
English
Author(s)
- Tor Olav Sunde
- Runar Dahl-Hansen
- Marit Synnøve Sæverud Stange
- Johan Henrik Ræder
- Per Martin Rørvik
Affiliation
- SINTEF Industry / Sustainable Energy Technology
- Unknown
Presented at
Piezp2021 Piezoelectrics for End Users Conference
Date
21.02.2021 - 24.02.2021
Organizer
PiezoInstitute