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Stress considerations for sputtered lead-free (Ba,Ca)(Zr,Ti)O3 thin films

Stress considerations for sputtered lead-free (Ba,Ca)(Zr,Ti)O3 thin films

Category
Academic lecture
Client
  • Research Council of Norway (RCN) / 250184
Language
English
Affiliation
  • SINTEF Industry / Sustainable Energy Technology
  • Unknown
Presented at
Piezp2021 Piezoelectrics for End Users Conference
Date
21.02.2021 - 24.02.2021
Organizer
PiezoInstitute
Year