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Stress considerations for sputtered lead-free (Ba,Ca)(Zr,Ti)O3 thin films

Category

Conference lecture

Language

English

Affiliation

  • SINTEF Industry / Sustainable Energy Technology

Presented at

Piezp2021 Piezoelectrics for End Users Conference

Date

21.02.2021 - 24.02.2021

Organizer

PiezoInstitute

Year

2021

View this publication at Norwegian Research Information Repository