Stress considerations for sputtered lead-free (Ba,Ca)(Zr,Ti)O3 thin films
Category
Conference lecture
Language
English
Author(s)
Affiliation
- SINTEF Industry / Sustainable Energy Technology
Presented at
Piezp2021 Piezoelectrics for End Users Conference
Date
21.02.2021 - 24.02.2021
Organizer
PiezoInstitute
Year
2021View this publication at Norwegian Research Information Repository