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Fabrication of active-edge detectors without support wafer using a unique "perforated edge" approach

Fabrication of active-edge detectors without support wafer using a unique "perforated edge" approach

Category
Lecture
Language
English
Affiliation
  • SINTEF Digital / Microsystems and Nanotechnology
Presented at
14th Trento Workshop on Advanced Silicon Radiation Detectors
Date
25.02.2019 - 27.02.2019
Year