Structure and optical properties of aSiAl and aSiAlHx magnetron sputtered thin films

Author(s)

• Annett Thøgersen
• Marit Synnøve Sæverud Stange
• Ingvild Julie Thue Jensen
• Arne Karstein Røyset
• Alexander G. Ulyashin
• Spyros Diplas

Affiliation

• SINTEF Industry / Sustainable Energy Technology
• SINTEF Industry / Metal Production and Processing
• SINTEF Industry / Materials and Nanotechnology

Issue

3

DOI