Abstract
SINTEF is developing in-house technology for sensors and high power actuators and transducers based on MEMS. Ferroelectric thin films possess a range of properties that make them a key element in such systems. Sol-gel derived piezoelectric PZT in silicon-based MEMS is a realistic combination of nano- and microtechnology: the essential properties of the PZT films require nano-scale control of chemistry and materials structure, while the substrate and device itself is state-of-the-art microtechnology. Thin films of PZT on silicon substrates can be machined to form beams, bridges, plates and membranes. In this project, SINTEF has designed, modelled, prepared and characterised demonstrators of such structures.