Analytical Model for Solid-state Diffusion of Nitrogen in Silicon
Category
Academic lecture
Language
English
Author(s)
- Espen Sagvolden
- Espen Flage-Larsen
- Ole Martin Løvvik
- Jesper Friis
Affiliation
- University of Oslo
- SINTEF Industry / Materials and Nanotechnology
Presented at
2012 MRS Fall Meeting
Date
25.11.2012 - 30.11.2012