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Conductive hydrophilic and hydrophobic high-temperature silicon direct wafer bonding

Category

Academic lecture

Client

  • Research Council of Norway (RCN) / 210601

Language

English

Author(s)

  • Kari Schjølberg-Henriksen
  • Lars Geir Whist Tvedt
  • Stein Are Gjelstad
  • Christopher Mørk
  • Sigurd T. Moe
  • Kristin Imenes
  • Erik Poppe
  • Dag Thorstein Wang

Affiliation

  • SINTEF Digital / Smart Sensors and Microsystems
  • University of South-Eastern Norway

Presented at

WaferBond'13

Place

Stockholm

Date

05.12.2013 - 06.12.2013

Organizer

Roy Knechtel, Frank Niklaus

Year

2013

View this publication at Cristin