Conductive hydrophilic and hydrophobic high-temperature silicon direct wafer bonding
Category
Academic lecture
Client
- Research Council of Norway (RCN) / 210601
Language
English
Author(s)
- Kari Schjølberg-Henriksen
- Lars Geir Whist Tvedt
- Stein Are Gjelstad
- Christopher Mørk
- Sigurd Moe
- Kristin Imenes
- Erik Poppe
- Dag Thorstein Wang
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- University of South-Eastern Norway
Presented at
WaferBond'13
Place
Stockholm
Date
05.12.2013 - 06.12.2013
Organizer
Roy Knechtel, Frank Niklaus