Silicon Sensor Technology

Tailored to demanding applications in industry, aerospace, healthcare and research, our sensor technologies have a large customer base both in Norway and internationally, thanks to their high measurement precision and excellent long-term stability. 

Our expertise

The Silicon Sensor Technology (SST) research group develops and manufactures high-precision sensor chips tailored to specific applications across two main technology areas: 

• Radiation sensors 
• Microelectromechanical systems (MEMS) 

SST develops radiation sensors to meet individual customer specifications and requirements. Our technology platform has been under continuous development since the early 1970s and can now deliver sensors for detection systems that offer excellent performance and can tolerate extreme radiation environments. 

Through research and development, SST has built internationally recognised expertise in the design, simulation, fabrication and testing of radiation sensors for detecting optical photons, X-rays, high-energy particles and heavy ions. SINTEF develops and manufactures silicon radiation detectors for some of the most demanding applications in scientific research, including experiments at CERN, synchrotrons, and X-ray free-electron lasers (XFELs), as well as for advanced industrial applications. 

Key examples of radiation sensors we have developed include: 

• Microstrip sensors offering high spatial resolution and fast readout. 
• Pixel sensors, which provide two-dimensional position resolution. 
• 3D sensors incorporate three-dimensional electrodes that penetrate into the sensor substrate, offering several advantages, including ultra-high radiation hardness, fast temporal response, reduced sensor dead volume, and improved neutron detection efficiency. 
• Low-Gain Avalanche Diodes (LGADs), sensors with internal signal amplification that are useful for applications requiring precise timing resolution or the detection of weak signals. 
• Silicon Drift Diodes (SDDs) offer very low noise levels and unsurpassed energy resolutions at low X-ray energies, which are mostly used for X-ray spectroscopy and electron microscopy. 
• Photodetectors that can be tailored to the wavelength and intensity of the light and can also be designed to detect individual photons. The sensor can also be integrated into photonic integrated circuits. 

MEMS tailored to applications requiring high precision and long-term stability represent SST's other core area of expertise. Through several decades of research and development in collaboration with academic and industrial partners, SST provides MEMS design and processing for the detection of pressure, strain and inertia in applications across aerospace, the process industries, healthcare and research. 

Examples of our technologies include: 

• Piezoresistive pressure sensors for aerospace and medical applications, developed in collaboration with Memscap. In aerospace applications, pressure measurement provides the basis for calculating aircraft altitude and therefore requires exceptional precision and reliability. 
• Inertial MEMS accelerometers – sensor technology for measuring physical acceleration. 
• Silicon-based IR sources used for gas detection, developed in collaboration with the Micro-Optics group at MiNaLab. 
• Packaging technology for MEMS and other relevant technologies. When sensor technologies are manufactured as chips, they need to be packaged for protection without compromising the sensor performance. 

Through SINTEF MiNaLab, we have access to one of the Nordic region's most advanced laboratory infrastructures for micro- and nanofabrication. This enables us to develop tailored solutions from initial concept through to small-scale production, working closely with customers and partners. 

How we work 

Our work is applied and project-oriented, always starting with specific needs identified by industry, the public sector or research organisations. At the same time, we work strategically to identify areas where our technology platforms can contribute to emerging technologies, such as quantum technology. This includes developing radiation sensors and MEMS components for integration into quantum sensors. 

Many of our projects begin with a technological challenge: How can we make a sensor more sensitive, enable it to withstand higher radiation levels, reduce its energy consumption, or ensure that it operates reliably under extreme conditions over long periods? 

The research group combines modelling and simulation, process development and experimental testing to develop solutions that deliver the performance and reliability customers require from their sensors. 

Our work is often carried out by multidisciplinary teams comprising materials scientists, physicists, electrical engineers and systems developers. Customers can work with us throughout the entire development process – from early concept development to pilot production and verification. 

What sets us apart? 

What makes SST and the other groups at MiNaLab unique is the combination of research expertise, design and process knowledge, and our own production infrastructure. We can develop and manufacture advanced sensor components that meet industrial requirements in-house at SINTEF MiNaLab, providing considerable flexibility and enabling short development cycles. 

The research group has built up extensive expertise in radiation sensors and MEMS over several decades and has experience with technologies subject to exceptionally demanding requirements for performance and long-term reliability (>30 years). 

Our strength therefore lies in combining research, development activities such as design and fabrication, and an understanding of industrial needs. This makes us an attractive partner for both technology companies and research organisations in Norway and internationally. 

An international research environment 

The research group collaborates with leading research organisations and technology partners across Europe and internationally. We participate in EU projects and research initiatives spanning fields from food-production monitoring to aerospace and high-energy physics. 

Through SINTEF MiNaLab, we are part of the national infrastructure NorFab,  providing researchers and industrial partners with access to advanced micro- and nanofabrication facilities. 

Selected highlights 

• Access to SINTEF MiNaLab – a complete production line for sensors and microsystems, including cleanrooms and advanced processing equipment. 
• Development of advanced 3D radiation detectors for use in high-radiation environments, including applications related to research at CERN. 
• Sensor solutions for aerospace applications where low energy consumption and high radiation tolerance are critical. 
• Proprietary process development for ultra-low leakage current in radiation sensors, developed through several decades of research and technology development. 
• Together with SLAC National Accelerator Laboratory, SST and SINTEF MiNaLab developed sensors that helped researchers understand and image the protein structure of the SARS-CoV-2 virus responsible for COVID-19. This provided important insights relevant to vaccine development. 
• Development of highly efficient photodetectors for self-calibrating photodiodes used for radiometric traceability to fundamental constants. This work has been carried out through a series of projects led by the Norwegian Metrology Service (Justervesenet): chipS CALe, S-CALe Up and S-CALe iIT. 
• Together with Memscap, SST and SINTEF MiNaLab have developed and manufactured pressure sensors used in approximately 150,000–200,000 aircraft and helicopters worldwide. 
• Development of a compact, cost-effective and ultra-sensitive sensor platform based on photonic integrated circuits (PICs) for monitoring air and water. Together with the Micro-Optics group, SST has demonstrated a functioning PIC with a monolithically integrated light source, waveguides and photodetector. COMPAS is a Horizon Europe project coordinated by SINTEF. 

How we can help 

Are you looking to develop a sensor tailored to demanding environments or specific performance requirements? Do you need a partner capable of taking an idea from concept to prototype? 

We can help with: 

• Development of tailored sensor technologies 
• Design and simulation of radiation detectors and MEMS 
• Process development and fabrication 
• Sensor testing and characterisation 
• Prototyping and small-scale production 
• Technology development for aerospace, industrial and medical applications 

We collaborate with start-ups, established industrial companies, public-sector organisations and academic research environments. 

Would you like to work with us? 

We are always open to new opportunities for collaboration. Get in touch to learn more about our research and how we can develop new sensor solutions together. 

Through research projects, pilot programmes, consultancy and technology partnerships, we help organisations turn advanced sensor technology into practical solutions that create value for society and the market.