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Department of Microsystems and Nanotechnology

Contact person

This is MiNaLab

The department of Microsystems and Nanotechnology at SINTEF has a
800 m² cleanroom in the MiNaLab building.

Our focus is on silicon sensor and actuator research, prototyping and small-scale production.

We offer

MiNaLab is ISO certified and the only independent complete silicon processing line in Norway.

The services offered by the department of Microsystems and Nanotechnology include feasibility studies, device design, prototyping, process development, and small and medium scale production in the MiNaLab cleanroom laboratory.
We are certified according to
ISO 14001, ISO 9001 and ISO 45001.

Both Norwegian and international industry use SINTEF MiNaLab for production of key components.

Our expertise

Radiation sensors

Our group at SINTEF develop and manufacture silicon radiation sensors adapted to custom specifications and requirements. Through our in-house design and world class cleanroom facilities, we offer flexibility on every level, from initial design and...


MEMS (Micro-Electro-Mechanical-System) based sensors, e.g. pressure sensors and accelerometers, are small, lightweight, cost efficient and suitable for high volume production.

Piezoelectric Microsystems

Piezoelectric Microsystems or piezoMEMS is an important technology platform with a multitude of possible applications

Medical Sensors and BioMEMS

Microsystems for medical, biological, and environmental applications with focus on microfluidic technologies, biosensors, and sensors for in vivo measurements.

Optical MEMS

Micro-opto-electromechanical systems (MOEMS or optical MEMS), are systems with structures in the micro- to millimeter range whose purposes are to manipulate light. Today's MOEMS devices include waveguides, moving mirrors and diffractive gratings.

Application areas



Aviation and space

Energy, oil and gas

Consumer electronics

Scientific and medical instrumentation



Visiting address:
Gaustadalléen 23 C
0373 Oslo, Norway
Map and directions

Research Director:
Mats Stefan Carlin