Silicon radiation sensors typically have an inactive volume at the device periphery necessary to accommodate multiple guard-rings and current terminating structures necessary to deliver increased breakdown voltage and stability and to shield the active area from the defects induced by the dicing...

SINTEF MiNaLab has a long-standing experience in the production of planar radiation detectors on N-type silicon substrates. In recent years, a growing interest in sensors produced on P-type substrates was demonstrated on many fronts. N-on-P sensor technology is now becoming the “to-go choice...

SINTEF in collaboration with University of Oslo have been performing R&D activities on 3D detectors with the aim to qualify to be a production site for ITk upgrade. In this context, a 3D detector fabrication run has been completed recently with very promising results. Various sensor geometries...

Capacitive micromachined ultrasound transducers (CMUTs) can be used to realize miniature ultrasound probes. Through-silicon vias (TSVs) allow for close integration of the CMUT and read-out electronics. A fabrication process enabling the realization of a CMUT array with TSVs is being developed. The...

We present the fabrication and characterisation of a low-cost, miniaturised, yet highly sensitive microphone, consisting of a nitride membrane and a diffractive Fresnel lens micromachined on the same chip. The membrane and the reflective Fresnel lens form an interferometer, and the displacement is...

We present a low-cost, miniaturised, yet highly sensitive microphone, consisting of a nitride membrane and a diffractive Fresnel lens micromachined on the same chip. The membrane and the reflective Fresnel lens form an interferometer, and the displacement is read by measuring light intensity at the...