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PiezoMEMS reliability: why the electrode-material matters in humid ambient

PiezoMEMS reliability: why the electrode-material matters in humid ambient

Category
Conference lecture and academic presentation
Client
  • Norges forskningsråd / NBRIX: Prosjektnummer: 247781
Language
English
Author(s)
  • Dahl-Hansen Runar Plunnecke
  • Akkopru-Akgun Betul
  • Denis Lyndsey
  • Coleman Kathleen
  • Polfus Jonathan M.
  • Vøllestad Einar
  • Tyholdt Frode
  • Trolier-Mckinstry Susan E
  • Tybell Per Thomas Martin
Affiliation
  • Norwegian University of Science and Technology
  • SINTEF Industry / Sustainable Energy Technology
  • SINTEF Digital / Microsystems and Nanotechnology
Presented at
IEEE IEEE International Symposium on Applications of Ferroelectrics (ISAF), 2019
Place
Lausanne
Date
13.07.2019 - 18.07.2019
Organizer
IEEE
Year
2019