To main content

Breakdown mechanisms and passivation of piezoelectric micro-mirrors

Breakdown mechanisms and passivation of piezoelectric micro-mirrors

Category
Conference lecture and academic presentation
Abstract
Lead Zirconate Titanate (Pb(Zrx,Ti1−x )O3) is, due to its high piezoresponse, widely used in piezoelectric Micro Electro Mechanical Systems (piezoMEMS) such as accelerometers, gyroscopes and actuators. However, since PZT is highly sensitive to humidity, devices tend to suffer severe degradation when operated under realistic or harsh conditions. The humidity-related breakdown mechanisms are many and complex, making the need for passivation critical in order to ensure reliable and long-lived piezoMEMS-devices.
Client
  • Norges forskningsråd / 247781
Language
English
Author(s)
Affiliation
  • Norwegian University of Science and Technology
  • SINTEF Digital / Microsystems and Nanotechnology
  • SINTEF Digital / Smart Sensor Systems
Presented at
NanoNetwork 2017
Place
Bergen
Date
11.06.2018 - 13.06.2018
Organizer
Norwegian University of Science and Technology (NTNU)
Year
2018