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Performance and reliability of PZT-based piezoelectric micromirrors operated in realistic environments

Performance and reliability of PZT-based piezoelectric micromirrors operated in realistic environments

Category
Conference lecture and academic presentation
Language
English
Author(s)
Affiliation
  • Norwegian University of Science and Technology
  • SINTEF Digital / Microsystems and Nanotechnology
Presented at
2018 ISAF-FMA-AMF-AMEC-PFM Joint Conference (IFAAP 2018) May 27 - June 1, 2018, Hiroshima
Place
Hiroshima
Date
26.05.2018 - 31.05.2018
Organizer
IEEE
Year
2018