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UV NANO IMPRINT LITOGRAPHY (UV-NIL) AT SINTEF MINALAB

UV NANO IMPRINT LITOGRAPHY (UV-NIL) AT SINTEF MINALAB

Category
Conference lecture and academic presentation
Language
English
Author(s)
Affiliation
  • SINTEF Digital / Microsystems and Nanotechnology
Presented at
Norsk elektrooptikkm√łte
Date
12.04.2016 - 14.04.2016
Year
2016