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Bond strength of conductive Si-Si bonded seals

Bond strength of conductive Si-Si bonded seals

Category
Part of a book/report
Client
  • Norges forskningsråd / 210601
Language
English
Author(s)
Affiliation
  • SINTEF Digital / Microsystems and Nanotechnology
  • University of South-Eastern Norway
Year
2014
Publisher
EDA Publishing Association
Book
Symposium on Design, test, Integration & Packaging of MEMS/MOEMS, Cannes, France, 1-4 April, 2014
ISBN
9782355000287
Page(s)
312 - 317