To main content

Bond strength of conductive Si-Si fusion bonded seals

Bond strength of conductive Si-Si fusion bonded seals

Category
Conference lecture and academic presentation
Client
  • Norges forskningsråd / 210601
Language
English
Author(s)
Affiliation
  • SINTEF Digital / Microsystems and Nanotechnology
  • University of South-Eastern Norway
  • University of South-Eastern Norway
Presented at
DTIP
Place
Cannes
Date
31.03.2014 - 03.04.2014
Organizer
CMP
Year
2014