PiezoMEMS reliability: why the electrode-material matters in humid ambient

PiezoMEMS reliability: why the electrode-material matters in humid ambient

Category

Academic lecture

Client

Research Council of Norway (RCN) / NBRIX: Prosjektnummer: 247781
Research Council of Norway (RCN) / NBRIX: PROSJEKTNUMMER: 247781

Language

English

Author(s)

Runar Plunnecke Dahl-Hansen
Betul Akkopru-Akgun
Lyndsey Denis
Kathleen Coleman
Jonathan Polfus
Einar Vøllestad
Frode Tyholdt
Susan E Trolier-Mckinstry
Per Thomas Martin Tybell

Affiliation

Norwegian University of Science and Technology
Unknown
SINTEF Industry / Sustainable Energy Technology
SINTEF Digital / Microsystems and Nanotechnology

Presented at

IEEE IEEE International Symposium on Applications of Ferroelectrics (ISAF), 2019

Place

Lausanne

Date

14.07.2019 - 19.07.2019

Organizer

IEEE

Year

2019