Performance and reliability of PZT-based piezoelectric micromirrors operated in realistic environments
Category
Poster
Language
English
Author(s)
- Runar Dahl-Hansen
- Frode Tyholdt
- Thomas Tybell
Affiliation
- Norwegian University of Science and Technology
- SINTEF Digital / Smart Sensors and Microsystems
- Unknown
Presented at
2018 ISAF-FMA-AMF-AMEC-PFM Joint Conference (IFAAP 2018) May 27 - June 1, 2018, Hiroshima
Place
Hiroshima
Date
27.05.2018 - 01.06.2018
Organizer
IEEE