Microelectromechanical Systems
Category
Academic chapter/article/Conference paper
Language
English
Author(s)
- Maaike Margrete Visser Taklo
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
Year
2012Publisher
Wiley-VCH
Book
Handbook of wafer bonding
ISBN
978-3-527-32646-4
Page(s)
281 - 300