Piezoelectric micromirror with integrated piezoresistive position sensors
Category
Poster
Language
English
Author(s)
- Thor Bakke
- Ib-Rune Johansen
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
Presented at
IEEE Optical MEMS and Nanophotonics
Place
Banff
Date
06.08.2012 - 09.08.2012
Organizer
IEEE