Next generation test equipment for micro-production
Category
Academic article
Language
English
Author(s)
- Kay Gastinger
- Lars Johnsen
- Malgorzata Kujawinska
- Michal Jozwik
- Uwe Zeitner
- Peter Dannberg
- Jorge Albero
- Sylwester Bargiel
- Christoph Schaeffel
- Stephan Beer
- Rudolf Moosburger
- Patrick Lamberlet
- Marco Pizzi
Affiliation
- SINTEF Digital
- SINTEF Digital / Smart Sensors and Microsystems
- Warsaw University of Technology
- Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
- National Center for Scientific Research
- Germany
- Swiss Center for Electronics and Microtechnology Inc.
- Switzerland
- Italy
Year
2010Published in
Proceedings of SPIE, the International Society for Optical Engineering
ISSN
0277-786X
Publisher
SPIE - The International Society for Optics and Photonics
Volume
7718