Abstract
A highly planar, robust 2D mirror with piezoelectric actuation is presented. The mirror can be operated in a wide frequency range including static deflection. It is ideally suited for target tracking and free-space optical communication.
A robust, non-resonant piezoelectric micromirror
Category
Academic chapter/article/Conference paper
Language
English
Author(s)
- Thor Bakke
- Ib-Rune Johansen
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
Year
2011Publisher
IEEE conference proceedings
Book
2011 International Conference on Optical MEMS and Nanophotonics (OMN) : Istanbul, 8-11 Aug., 2011
ISBN
978-1-4577-0334-8
Page(s)
171 - 172