A Robust, Non-Resonant Piezoelectric Micromirror
Category
Poster
Language
English
Author(s)
- Thor Bakke
- Ib-Rune Johansen
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
Presented at
IEEE Optical MEMS and Nanophotonics
Place
Istanbul
Date
08.08.2011 - 11.08.2011
Organizer
IEEE