Handbook of wafer bonding
Category
Academic anthology/Conference proceedings
Language
English
Author(s)
- Peter Ramm
- James Jian-Qiang Lu
- Maaike Margrete Visser Taklo
Affiliation
- Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
- Rensselaer Polytechnic Institute
- SINTEF Digital / Smart Sensors and Microsystems
Year
2012Publisher
Wiley-VCH
ISBN
978-3-527-32646-4