To main content

Elemental distribution and oxygen deficiency of magnetron sputtered indium tin oxide films

Category

Academic article

Language

English

Author(s)

Affiliation

  • SINTEF Industry / Sustainable Energy Technology
  • University of Oslo
  • Institute for Energy Technology

Year

2011

Published in

Journal of Applied Physics

ISSN

0021-8979

Volume

109

Issue

11

View this publication at Norwegian Research Information Repository