Elemental distribution and oxygen deficiency of magnetron sputtered indium tin oxide films

Category

Academic article

Language

English

Author(s)

Annett Thøgersen
Margrethe Holmer Rein
Edouard Monakhov
Jeyanthinath Mayandi
Spyros Diplas

Affiliation

SINTEF Industry / Sustainable Energy Technology
University of Oslo
Institute for Energy Technology

Year

2011

Published in

Journal of Applied Physics

ISSN

0021-8979

Volume

109

Issue

11

DOI

https://doi.org/10.1063/1.3587174

View this publication at Norwegian Research Information Repository