Passivation of silicon wafer patterned by aluminium for micromachining
Category
Poster
Language
English
Author(s)
- Xuyuan Chen
- Ani Duan
- Erik Poppe
Affiliation
- University of South-Eastern Norway
- SINTEF Digital
Presented at
Optical MEMS & Nanophotonics : International Conference on Optical MEMS and Nanophotonics
Place
Taiwan
Date
11.08.2007 - 16.08.2007