Anodic bonding of glass to aluminium
Category
Conference lecture
Language
English
Author(s)
- Henrik Jakobsen
- Kari Schjølberg-Henriksen
- Erik Poppe
- S Moe
- Maaike Margrete Visser Taklo
- Dag Thorstein Wang
Presented at
Workshop on Wafer Bonding for MEMS
Place
Halle, Germany
Date
10.10.2004 - 12.10.2004
Year
2004View this publication at Norwegian Research Information Repository