To main content

Metallization scheme and release methods for fabrication of RF MEMS switches

Category

Academic chapter/article/Conference paper

Language

English

Author(s)

  • Shimul Chandra Saha
  • Trond Sæther
  • Geir uri Jensen
  • Erik Poppe
  • Håkon Sagberg

Affiliation

  • Norwegian University of Science and Technology
  • SINTEF
  • Unknown

Year

2007

Publisher

MNE 2007

Book

Proceedings of the 33rd Micro- and Nano- Engineering conference (MNE 2007)

Issue

1

ISBN

9-999-99999-9

Page(s)

773 - 774

View this publication at Cristin