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Metallization scheme and release methods for fabrication of RF MEMS switches

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Category

Academic chapter

Language

English

Author(s)

Affiliation

  • SINTEF
  • Norwegian University of Science and Technology

Year

2007

Publisher

MNE 2007

Book

Proceedings of the 33rd Micro- and Nano- Engineering conference (MNE 2007)

ISBN

9789999999991

Page(s)

773 - 774

View this publication at Norwegian Research Information Repository