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The temperature evolution of the hydrogen plasma induced structural defects in crystalline silicon

The temperature evolution of the hydrogen plasma induced structural defects in crystalline silicon

Category
Academic article
Language
English
Author(s)
  • Heidi Nordmark
  • Alexander Ulyashin
  • John C Walmsley
  • Arve Holt
  • Randi Holmestad
Affiliation
  • Norwegian University of Science and Technology
  • Unknown
  • SINTEF
  • Institute for Energy Technology
Year
Published in
Solid State Phenomena
ISSN
1012-0394
Volume
131-133
Page(s)
315 - 320