Gamma-radiation hardness and long-term stability of ALD-Al2O3 surface passivated Si

Client

• Research Council of Norway (RCN) / 289437

Author(s)

• Michael Getz
• Marco Povoli
• Ozhan Koybasi
• Tomas Slavicek
• Eduard Monakhov

Affiliation

• University of Oslo
• SINTEF Digital / Smart Sensors and Microsystems
• Czech Technical University in Prague

Issue

15

DOI