Gamma-radiation hardness and long-term stability of ALD-Al2O3 surface passivated Si

Category

Academic article

Language

English

Author(s)

Michael Getz
Marco Povoli
Ozhan Koybasi
Tomas Slavicek
Eduard Monakhov

Affiliation

SINTEF Digital / Smart Sensors and Microsystems
Czech Technical University in Prague
University of Oslo

Year

2023

Published in

Journal of Applied Physics

ISSN

0021-8979

Volume

133

Issue

15

DOI

https://doi.org/10.1063/5.0143013

View this publication at Norwegian Research Information Repository