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3D silicon detectors for neutron imaging applications

Abstract

Neutron detection is of great importance in many fields spanning from scientific research, to nuclear science, and to medical application. The development of silicon-based neutron detectors with enhanced neutron detection efficiency can offer several advantages such as spatial resolution, enhanced dynamic range and background discrimination. In this work, increased detection efficiency is pursued by fabricating high aspect ratio 3D micro-structures filled with neutron converting materials (B4C) on planar silicon detectors. An in-depth feasibility study was carried out in all aspects of the sensor fabrication technology. Passivation of the etched structures was studied in detail, to ensure good electrical performance. The conformal deposition of B4C with a newly developed process showed excellent results. Preliminary electrical characterisation of the completed devices is promising, and detectors have been mounted on dedicated boards in view of the upcoming tests with neutrons.
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Category

Academic article

Language

English

Author(s)

  • Marco Povoli
  • Angela Kok
  • Ozhan Koybasi
  • Michael Getz
  • George O'Neill
  • Dieter Röhrich
  • Eduard Monakhov
  • Henrik Pedersen
  • Jens Birch
  • Arun Haridas Choolakkal
  • Kalliopi Kanaki
  • Chung-Chuan Lai
  • Richard Hall-Wilton
  • Tomas Slavicek
  • Isabel Llamas-Jansa

Affiliation

  • SINTEF Digital / Smart Sensors and Microsystems
  • Linköping University
  • European Spallation Source
  • Fondazione Bruno Kessler
  • International Atomic Energy Agency
  • Czech Technical University in Prague
  • University of Bergen
  • University of Oslo
  • Institute for Energy Technology

Date

24.01.2023

Year

2023

Published in

Journal of Instrumentation (JINST)

Volume

18

Page(s)

1 - 12

View this publication at Norwegian Research Information Repository