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Cross-Sectional Carrier Lifetime Profiling and Deep Level Monitoring in Silicon Carbide Films Exhibiting Variable Carbon Vacancy Concentrations

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Category

Academic article

Client

  • Research Council of Norway (RCN) / 245963
  • Research Council of Norway (RCN) / 274742
  • Research Council of Norway (RCN) / 325573
  • Sigma2 / NN9136K
  • Research Council of Norway (RCN) / 251131

Language

English

Author(s)

  • Augustinas Galeckas
  • Robert Michael Karsthof
  • Gana Kingsly
  • Angela Kok
  • Marianne Etzelmüller Bathen
  • Lasse Vines
  • Andrej Kuznetsov

Affiliation

  • University of Oslo
  • SINTEF Digital / Smart Sensors and Microsystems
  • ETH Zurich

Date

10.11.2022

Year

2022

Published in

Physica Status Solidi (a) applications and materials science

ISSN

1862-6300

Publisher

John Wiley & Sons

Page(s)

1 - 7

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